www.cenkacar.info - Cenk Acar - Inertial MEMS, Micromachined Gyroscopes

Publications

PUBLISHED BOOKS

Cenk Acar and Andrei Shkel. “MEMS Vibratory Gyroscopes - Structural Approaches to Improve Robustness”. MEMS Reference Shelf Series, Springer. Hardcover, 2009, XII, 260 p. 131 illus., ISBN: 978-0-387-09535-6. [Purchase]

DISSERTATION

Cenk Acar. “Robust Micromachined Vibratory Gyroscopes ” Ph.D. Thesis, University of California Irvine, 2004. [PDF 4.2MB]

JOURNAL PUBLICATIONS

Cenk Acar, Adam Schofield, Alex Trusov, Lynn Costlow, and Andrei Shkel. “Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications” IEEE Sensors Journal, to be submitted 2008.
Cenk Acar and Andrei Shkel. “Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator” Journal of Microelectromechanical Systems, Vol. 15, No. 2, pp. 380-387, 2006.
Cenk Acar and Andrei Shkel. “Structurally Decoupled Micromachined Gyroscopes with Post-Release Capacitance Enhancement” Journal of Micromechanics and Microengineering, Inst.of Physics Pub. Vol.15, pp. 1092-1101, 2005.
Cenk Acar and Andrei Shkel. “An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes” Journal of Microelectromechanical Systems, Vol. 14, No. 3, pp. 520-528, 2005.
Cenk Acar and Andrei Shkel. “Non-Resonant Micromachined Gyroscopes with Structural Mode-Decoupling” IEEE Sensors Journal . Vol. 3, No. 4, pp. 497-506, 2003.
Cenk Acar and Andrei Shkel. “Structural Design and Experimental Characterization of Torsional Micromachined Gyroscopes with Non-Resonant Drive-Mode” Journal of Micromechanics and Microengineering, Inst.of Physics Pub. Vol.14, pp.15-25, 2003.
Cenk Acar and Andrei Shkel. “Experimental Evaluation and Comparative Analysis of Commercial Variable-Capacitance MEMS Accelerometers” Journal of Micromechanics and Microengineering, Institute of Physics Pub., Vol.13, pp.634-645, 2003.
Cenk Acar and Andrei Shkel. “Four Degrees-of-Freedom Micromachined Gyroscopes, Journal of Modeling and Simulations of Microsystems, Vol. 2, No. 1, pp. 71-82, 2001.

ARCHIVAL CONFERENCE PROCEEDINGS

Adam R. Schofield, Alexander A. Trusov, Cenk Acar and Andrei M. Shkel, Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode, International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 07), pp. 1199-1202, Lyon, France, June 10-14, 2007
Alexander Trusov, Cenk Acar and Andrei Shkel. “Comparative Analysis of Distributed Mass Micromachined Gyroscopes Fabricated in SCS-SOI and EFAB Processes”, 2006 SPIE Conference Smart Structures and Materials, San Diego, 2006
Cenk Acar, Andrei Shkel, Lynn Costlow, and Asad Madni. “Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator” 2005 IEEE Sensors, October 2005, Irvine, CA, USA
Andrei Shkel, Cenk Acar, and Chris Painter. “Two Types of Micromachined Vibratory Gyroscopes” 2005 IEEE Sensors, October 2005, Irvine, CA, USA
Cenk Acar, Chris Painter, Adam Schofield, and Andrei Shkel. Robust Micromachined Gyroscopes for Automotive Applications”, NSTI Nanotech 2005 Conference, pp. 375-378, May 2005, Anaheim, CA, USA
Cenk Acar and Andrei Shkel. “A Simple System-Identification Algorithm for Electrostatic MEMS Resonators” 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), January 2005, Miami Beach, Florida.
Cenk Acar and Andrei Shkel. “Non-Resonant Surface-Micromachined Z-Axis Gyroscopes Utilizing Torsional Out-of-Plane Detection”2004 IEEE Sensors, October 2004, Vienna, Austria
Cenk Acar and Andrei Shkel. “Post-Release Capacitance Enhancement in Micromachined Devices” 2004 IEEE Sensors, October 2004, Vienna, Austria
Cenk Acar and Andrei Shkel. “An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes” 2004 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, South Carolina, June 2004
Cenk Acar and Andrei Shkel. “A Class of Distributed-Mass Micromachined Gyroscopes” The Electronic Components and Technology Conference (ECTC), 1-4 June, 2004, Las Vegas, Nevada, USA
Cenk Acar and Andrei Shkel. “Distributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling” 2003 IEEE Sensors, September 2003, Toronto, Canada, pp.445-450
Cenk Acar and Andrei Shkel. “Comparative Characterization of Low-g Capacitive MEMS Accelerometers” International Workshop on Structural Health Monitoring, Stanford University, September 15-17, 2003, pp. 1059-1066
Cenk Acar and Andrei Shkel. “MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators” Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2003) March 2003, San Francisco, CA, U.S.A.
Cenk Acar and Andrei Shkel. “A Class of MEMS Gyroscopes with Increased Parametric Space” 2002 IEEE Sensors, June 2002, Orlando, FL, USA
Cenk Acar and Andrei Shkel. “Design Concept and Preliminary Experimental Demonstration of MEMS Gyroscopes with 4-DOF “Master-Slave” Architecture” 2002 SPIE Annual International Symposium on Smart Structures and Materials, March, 2002, San Diego, CA
Cenk Acar and Andrei Shkel. “Micro-Gyroscopes with Dynamic Disturbance Rejection”, 2001 SPIE Annual International Symposium on Smart Structures and Materials, March, 2001, Newport Beach, CA
Cenk Acar and Andrei Shkel. “A Design Approach for Increasing Robustness of Rate Gyroscopes”. Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2001) March 2001, Hilton Head Island, South Carolina, U.S.A.
Cenk Acar, Sebnem Eler, Andrei Shkel. “Concept, Implementation, and Control of Wide Bandwidth MEMS Gyroscopes”. The American Control Conference. June, 2001, Arlington, VA, USA